不锈钢、碳钢 Stainless steel, carbon steel |
单面镀膜、双面镀膜 Single side coating, double side coating |
感应蒸发、磁控溅射 Induction evaporation, magnetron sputtering |
400mm-1700mm |
φ500mm-φ800mm |
1m/min~15m/min(2m/min~30m/min、50m/min~800m/min) |
铜、铬、钛、银等 Cu, Cr, Ti, Ag, etc |
PET(3.8U-300U)PI(15U-150U)铜、铝箔、无纺布、纸等各种卷材 PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils |
清洁容器抽至6X10-3Pa≤20min Clean the container until 6x10-3pa≤20min |
清洁空容器抽至8×10-4Pa≤24h Clean empty containers and pump until 8×10-4pa≤24h |
8×10-4Pa |
φ500mm-φ1200mm |
-25℃~80℃ |
平面靶、圆柱靶 Plane target, cylindrical target |
直流、中频 Dc, if |
2×10-1Pa |
氩气、氧气,纯度99.99% Ar, O2, 99.99% purity |
质量流量控制器控制 Mass flow controller control |
采用西门子变频恒张力全自动收放卷系统 Siemens variable frequency constant tension automatic winding and unwinding system is adopted |
收卷放卷端各有一条360度可调舒展辊 There is a 360-degree adjustable stretch roll at each end of winding and unwinding |
西门子电机 Siemens motor |
胀块式、键条式等 Bulk-type, key-bar type, etc |
3″、 6″气胀轴 3 ", 6 "gas expansion axis |
2000L分子泵,速度为2000升/秒 2000L molecular pump with a speed of 2000 L/S |
3600L分子泵,速度为3600升/秒 3600L molecular pump at a speed of 3600 L/S |
ZJ1200罗茨泵组,速度为1200升/秒 ZJ1200 roots pump set, speed 1200 L/S |
ZJ2500罗茨泵组,速度为2500升/秒 ZJ2500 roots pump set, speed 2500 L/S |
2H150滑阀泵,每台速度150升/秒 2H150 slide valve pump, 150 L/S per set |
冷暖交换机组 Heating and cooling exchange unit |
深冷捕集器 Cryogenic trap |
100KW-400KW |
380V 三相五线 380V Three phase five wire |